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Electrochemical etching of silicon
Vrzal, Pavel ; Voborný, Stanislav (referee) ; Šamořil, Tomáš (advisor)
The electrochemical etching is very used technique for semiconductor materials modification. Different structures which find applications in many fields (biotechnology, nanotechnology or electronics) can be prepared by this technique. The task of bachelor’s thesis was preparation of porous silicon using electrochemical etching. At first, a study dedicated to porous Si was carried out. Experimental part of this work deals with a design of etching cell which was used for preparation of porous silicon by electrochemical etching. In addition, the porous Si was prepared by metal assisted chemical etching. Subsequently, created structures were analyzed by scanning electron microscopy. Photoluminescence properties of porous silicon were studied as well.
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Electrochemical etching of silicon
Vrzal, Pavel ; Voborný, Stanislav (referee) ; Šamořil, Tomáš (advisor)
The electrochemical etching is very used technique for semiconductor materials modification. Different structures which find applications in many fields (biotechnology, nanotechnology or electronics) can be prepared by this technique. The task of bachelor’s thesis was preparation of porous silicon using electrochemical etching. At first, a study dedicated to porous Si was carried out. Experimental part of this work deals with a design of etching cell which was used for preparation of porous silicon by electrochemical etching. In addition, the porous Si was prepared by metal assisted chemical etching. Subsequently, created structures were analyzed by scanning electron microscopy. Photoluminescence properties of porous silicon were studied as well.
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Electrochemical etching of silicon
Vrzal, Pavel ; Voborný, Stanislav (referee) ; Šamořil, Tomáš (advisor)
The electrochemical etching is very used technique for semiconductor materials modification. Different structures which find applications in many fields (biotechnology, nanotechnology or electronics) can be prepared by this technique. The task of bachelor’s thesis was preparation of porous silicon using electrochemical etching. At first, a study dedicated to porous Si was carried out. Experimental part of this work deals with a design of etching cell which was used for preparation of porous silicon by electrochemical etching. In addition, the porous Si was prepared by metal assisted chemical etching. Subsequently, created structures were analyzed by scanning electron microscopy. Photoluminescence properties of porous silicon were studied as well.
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